Shozo Hosoda

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 6,110,287
- Issue date Aug 29, 2000
- Tokyo Electron Limited
- Izumi Arai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,779,803
- Issue date Jul 14, 1998
- Tokyo Electron Limited
- Yoichi Kurono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process apparatus and vacuum processing method
- Patent number 5,611,655
- Issue date Mar 18, 1997
- Tokyo Electron Limited
- Yoshio Fukasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method
- Patent number 5,578,164
- Issue date Nov 26, 1996
- Tokyo Electron Limited
- Yoichi Kurono
- H01 - BASIC ELECTRIC ELEMENTS