Shozo Kawasaki

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate surface inspecting apparatus and substrate surface inspec...
- Patent number 8,508,246
- Issue date Aug 13, 2013
- Shibaura Mechatronics Corporation
- Hiroshi Wakaba
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SURFACE INSPECTING APPARATUS AND SUBSTRATE SURFACE INSPEC...
- Publication number 20100310152
- Publication date Dec 9, 2010
- Shibaura Mechatronics Coporation
- Hiroshi Wakaba
- G01 - MEASURING TESTING