Shozo TAKAHASHI

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning liquid supplying system, substrate processing apparatus an...
- Patent number 11,090,692
- Issue date Aug 17, 2021
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing pad and chemical mechanical polishing apparatus for polis...
- Patent number 9,821,429
- Issue date Nov 21, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
- Publication number 20240383011
- Publication date Nov 21, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240363372
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING LIQUID SUPPLYING SYSTEM, SUBSTRATE PROCESSING APPARATUS AN...
- Publication number 20190308223
- Publication date Oct 10, 2019
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLIS...
- Publication number 20140004772
- Publication date Jan 2, 2014
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING