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Shozo Yoneda

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Patents Grantslast 30 patents

  • Information Patent Grant

    Pattern inspection method
    • Patent number 7,049,589
    • Issue date May 23, 2006
    • Hitachi, Ltd.
    • Atsuko Yamaguchi
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    Pattern inspection method
    • Publication number 20040195507
    • Publication date Oct 7, 2004
    • Atsuko Yamaguchi
    • G01 - MEASURING TESTING