Shozou MAEDA

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing method, substrate processing apparatus and record...
- Patent number 10,727,042
- Issue date Jul 28, 2020
- Tokyo Electron Limited
- Mitsunori Nakamori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Liquid processing apparatus
- Patent number 9,348,340
- Issue date May 24, 2016
- Tokyo Electron Limited
- Mikio Nakashima
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...
- Publication number 20180040471
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150053285
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Mikio NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS