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Shreeram Jyoti Dash
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Reducing aspect ratio dependent etch with direct current bias pulsing
Patent number
12,237,149
Issue date
Feb 25, 2025
Applied Materials, Inc.
Deyang Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING
Publication number
20240162007
Publication date
May 16, 2024
Applied Materials, Inc.
Deyang LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20240145215
Publication date
May 2, 2024
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE COMPENSATION FOR PLASMA PROCESSING APPLICATIONS
Publication number
20240055244
Publication date
Feb 15, 2024
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Analyzing and Intelligently Collecting Sens...
Publication number
20230282465
Publication date
Sep 7, 2023
LAM RESEARCH CORPORATION
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS