Shrikant P. Lohokare

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of damaged low-k dielectric film layer removal
- Patent number 8,277,675
- Issue date Oct 2, 2012
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for self-cleaning dry etch
- Patent number 8,211,238
- Issue date Jul 3, 2012
- Lam Research Corporation
- Andrew D. Bailey, III
- B08 - CLEANING
Information Patent Grant
Method for stress free conductor removal
- Patent number 8,017,516
- Issue date Sep 13, 2011
- Lam Research Corporation
- Andrew D. Bailey, III
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and arrangement for the reduction of byproduct deposition i...
- Patent number 7,959,984
- Issue date Jun 14, 2011
- Lam Research Corporation
- Shrikant P. Lohokare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for adjusting voltage on a powered Faraday shield
- Patent number 7,413,673
- Issue date Aug 19, 2008
- Lam Research Corporation
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for surface reduction, passivation, corrosion pre...
- Patent number 7,232,766
- Issue date Jun 19, 2007
- Lam Research Corporation
- Andrew D. Bailey, III
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for stress free conductor removal
- Patent number 7,217,649
- Issue date May 15, 2007
- Lam Research Corporation
- Andrew D. Bailey, III
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for self-cleaning dry etch
- Patent number 7,140,374
- Issue date Nov 28, 2006
- Lam Research Corporation
- Andrew D. Bailey, III
- B08 - CLEANING
Information Patent Grant
Methods and systems for a stress-free cleaning a surface of a subst...
- Patent number 7,129,167
- Issue date Oct 31, 2006
- Lam Research Corporation
- Andrew D. Bailey, III
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for improved global dual-damascene pla...
- Patent number 6,939,796
- Issue date Sep 6, 2005
- Lam Research Corporation
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for improved local dual-damascene plan...
- Patent number 6,821,899
- Issue date Nov 23, 2004
- Lam Research Corporation
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and method for stress free conductor removal
- Publication number 20070190771
- Publication date Aug 16, 2007
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, method and apparatus for self-cleaning dry etch
- Publication number 20060219267
- Publication date Oct 5, 2006
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- B08 - CLEANING
Information Patent Application
Methods and arrangement for the reduction of byproduct deposition i...
- Publication number 20060130758
- Publication date Jun 22, 2006
- Shrikant P. Lohokare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for adjusting voltage on a powered faraday shield
- Publication number 20050194355
- Publication date Sep 8, 2005
- LAM RESEARCH CORPORATION
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for stress free conductor removal
- Publication number 20050106848
- Publication date May 19, 2005
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, method and apparatus for self-cleaning dry etch
- Publication number 20050093012
- Publication date May 5, 2005
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- B08 - CLEANING
Information Patent Application
System and method for surface reduction, passivation, corrosion pre...
- Publication number 20050087759
- Publication date Apr 28, 2005
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System, method and apparatus for improved global dual-damascene pla...
- Publication number 20040248408
- Publication date Dec 9, 2004
- LAM RESEARCH CORPORATION
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, method and apparatus for improved local dual-damascene plan...
- Publication number 20040180545
- Publication date Sep 16, 2004
- LAM RESEARCH CORPORATION
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS

Shrikant P. Lohokare

Person

Patents Grantslast 30 patents

Method of damaged low-k dielectric film layer removal

System, method and apparatus for self-cleaning dry etch

Method for stress free conductor removal

Methods and arrangement for the reduction of byproduct deposition i...

Method for adjusting voltage on a powered Faraday shield

System and method for surface reduction, passivation, corrosion pre...

System and method for stress free conductor removal

System, method and apparatus for self-cleaning dry etch

Methods and systems for a stress-free cleaning a surface of a subst...

System, method and apparatus for improved global dual-damascene pla...

System, method and apparatus for improved local dual-damascene plan...

Patents Applicationslast 30 patents

System and method for stress free conductor removal

System, method and apparatus for self-cleaning dry etch

Methods and arrangement for the reduction of byproduct deposition i...

Method for adjusting voltage on a powered faraday shield

System and method for stress free conductor removal

System, method and apparatus for self-cleaning dry etch

System and method for surface reduction, passivation, corrosion pre...

System, method and apparatus for improved global dual-damascene pla...

System, method and apparatus for improved local dual-damascene plan...