Shriram Vasant Bapat

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR MEASURING GAP BETWEEN A SUBSTRATE SUPPORT PLANE AND...
- Publication number 20240213060
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Adriana Vintila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION AND LOCAL STRESS MODULATION FOR WAFER BOW COMPE...
- Publication number 20240003010
- Publication date Jan 4, 2024
- LAM RESEARCH CORPORATION
- Yanhui Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACELESS SHOWERHEAD
- Publication number 20230366089
- Publication date Nov 16, 2023
- Lam Research Corporation
- Shriram Vasant Bapat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20230005740
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...