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Taichung City, TW
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Patents Grants
last 30 patents
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Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
Patent number
12,128,522
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shu-Bin Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
Patent number
11,407,083
Issue date
Aug 9, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Shu-Bin Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
Patent number
10,328,549
Issue date
Jun 25, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Shu-Bin Hsu
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
Publication number
20220355437
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Bin HSU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
Publication number
20190308295
Publication date
Oct 10, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Bin HSU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
Publication number
20150158140
Publication date
Jun 11, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Bin HSU
B24 - GRINDING POLISHING