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Patents Grants
last 30 patents
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Patent Grant
Method for controlling temperature of furnace in semiconductor fabr...
Patent number
10,930,527
Issue date
Feb 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Jian-Lun Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling temperature of furnace in semiconductor fabr...
Patent number
10,741,426
Issue date
Aug 11, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Jian-Lun Lo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CONTROLLING TEMPERATURE OF FURNACE IN SEMICONDUCTOR FABR...
Publication number
20200312685
Publication date
Oct 1, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Jian-Lun LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING TEMPERATURE OF FURNACE IN SEMICONDUCTOR FABR...
Publication number
20190096714
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Jian-Lun LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING MODULE
Publication number
20140021193
Publication date
Jan 23, 2014
SHU-CHIEN CHAO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR