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Shu-Han CHAO
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Extended acid etch for oxide removal
Patent number
11,655,146
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hong-Ta Kuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
EXTENDED ACID ETCH FOR OXIDE REMOVAL
Publication number
20230264949
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hong-Ta KUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXTENDED ACID ETCH FOR OXIDE REMOVAL
Publication number
20220153574
Publication date
May 19, 2022
Taiwan Semiconductor Manufacturing Company Limited
Hong-Ta KUO
B81 - MICRO-STRUCTURAL TECHNOLOGY