TREA

Shu-Hsien Wu

Follow

Person

  • Hsin-Chu County, TW
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Damage prevention on EUV mask
    • Patent number 9,740,094
    • Issue date Aug 22, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Wen Lin
    • B08 - CLEANING
  • Information Patent Grant

    Mask pellicle indicator for haze prevention
    • Patent number 9,658,526
    • Issue date May 23, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Wen Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    Damage Prevention on EUV Mask
    • Publication number 20170052443
    • Publication date Feb 23, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Wen Lin
    • B08 - CLEANING
  • Information Patent Application

    Mask Pellicle Indicator for Haze Prevention
    • Publication number 20170003585
    • Publication date Jan 5, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Wen Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY