Shu-Hsin Kao

Person

Redwood City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing system including a hydrostatic fluid bearing support
- Patent number 6,875,085
- Issue date Apr 5, 2005
- Mosel Vitelic, Inc.
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Hydrostatic fluid bearing support with adjustable inlet heights
- Patent number 6,454,641
- Issue date Sep 24, 2002
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring for wafer polishing
- Patent number 6,267,655
- Issue date Jul 31, 2001
- Mosel Vitelic, Inc.
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system including a hydrostatic fluid bearing support
- Patent number 6,244,945
- Issue date Jun 12, 2001
- Mosel Vitelic, Inc.
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Seal for polishing belt center support having a single movable seal...
- Patent number 6,126,527
- Issue date Oct 3, 2000
- Aplex Inc.
- Shu-Hsin Kao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method using a hydrostatic fluid bearing support having f...
- Patent number 6,086,456
- Issue date Jul 11, 2000
- Aplex, Inc.
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system including a hydrostatic fluid bearing support
- Patent number 6,062,959
- Issue date May 16, 2000
- Aplex Group
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature regulation in a CMP process
- Patent number 6,000,997
- Issue date Dec 14, 1999
- Aplex, Inc.
- Shu-Hsin Kao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing tool having a sealed fluid chamber for support of polishi...
- Patent number 5,980,368
- Issue date Nov 9, 1999
- Aplex Group
- Shou-sung Chang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing system including a hydrostatic fluid bearing support
- Publication number 20030017787
- Publication date Jan 23, 2003
- David E. Weldon
- B24 - GRINDING POLISHING

Shu-Hsin Kao

Person

Patents Grantslast 30 patents

Polishing system including a hydrostatic fluid bearing support

Hydrostatic fluid bearing support with adjustable inlet heights

Retaining ring for wafer polishing

Polishing system including a hydrostatic fluid bearing support

Seal for polishing belt center support having a single movable seal...

Polishing method using a hydrostatic fluid bearing support having f...

Polishing system including a hydrostatic fluid bearing support

Temperature regulation in a CMP process

Polishing tool having a sealed fluid chamber for support of polishi...

Patents Applicationslast 30 patents

Polishing system including a hydrostatic fluid bearing support