TREA

Shu-Kwan LAU

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  • Sunnyvale, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Spot heating by moving a beam with horizontal rotary motion
    • Patent number 11,842,907
    • Issue date Dec 12, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Danny Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Multi zone spot heating in EPI
    • Patent number 11,821,088
    • Issue date Nov 21, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Chamber injector
    • Patent number 11,807,931
    • Issue date Nov 7, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Linear lamp array for improved thermal uniformity and profile control
    • Patent number 11,680,338
    • Issue date Jun 20, 2023
    • Applied Materials, Inc.
    • Brian Burrows
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chamber injector
    • Patent number 11,492,704
    • Issue date Nov 8, 2022
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In-situ temperature mapping for epi chamber
    • Patent number 11,261,538
    • Issue date Mar 1, 2022
    • Applied Materials, Inc.
    • Ala Moradian
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer spot heating with beam width modulation
    • Patent number 11,177,144
    • Issue date Nov 16, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Liner for epi chamber
    • Patent number 11,060,203
    • Issue date Jul 13, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi zone spot heating in epi
    • Patent number 11,021,795
    • Issue date Jun 1, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Methods and apparatus for gallium nitride deposition
    • Patent number 10,995,419
    • Issue date May 4, 2021
    • Applied Materials, Inc.
    • Brian H. Burrows
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    EPI thickness tuning by pulse or profile spot heating
    • Patent number 10,770,319
    • Issue date Sep 8, 2020
    • Applied Materials, Inc.
    • Shu-Kwan Danny Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Inject insert for EPI chamber
    • Patent number 10,760,161
    • Issue date Sep 1, 2020
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transfer mechanisms
    • Patent number 10,453,733
    • Issue date Oct 22, 2019
    • Applied Materials, Inc.
    • Masato Ishii
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Flow controlled liner having spatially distributed gas passages
    • Patent number 10,170,342
    • Issue date Jan 1, 2019
    • Applied Materials, Inc.
    • Mehmet Tugrul Samir
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating modulators to improve epi uniformity tuning
    • Patent number 10,132,003
    • Issue date Nov 20, 2018
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    EPI pre-heat ring
    • Patent number 10,047,457
    • Issue date Aug 14, 2018
    • Applied Materials, Inc.
    • Kartik Shah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate transfer mechanisms
    • Patent number 9,905,454
    • Issue date Feb 27, 2018
    • Applied Materials, Inc.
    • Masato Ishii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Flow controlled liner having spatially distributed gas passages
    • Patent number 9,842,748
    • Issue date Dec 12, 2017
    • Applied Materials, Inc.
    • Mehmet Tugrul Samir
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support with surface feature for reduced reflection and m...
    • Patent number 9,814,099
    • Issue date Nov 7, 2017
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Quartz upper and lower domes
    • Patent number 9,768,043
    • Issue date Sep 19, 2017
    • Applied Materials, Inc.
    • Anzhong Chang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Flow controlled liner having spatially distributed gas passages
    • Patent number 9,553,002
    • Issue date Jan 24, 2017
    • Applied Materials, Inc.
    • Mehmet Tugrul Samir
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Susceptor support shaft with uniformity tuning lenses for EPI process
    • Patent number 9,532,401
    • Issue date Dec 27, 2016
    • Applied Materials, Inc.
    • Zhepeng Cong
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Susceptor support shaft for improved wafer temperature uniformity a...
    • Patent number 9,123,765
    • Issue date Sep 1, 2015
    • Applied Materials, Inc.
    • Mehmet Tugrul Samir
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Lower chamber liner
    • Patent number D717746
    • Issue date Nov 18, 2014
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Upper chamber liner
    • Patent number D716239
    • Issue date Oct 28, 2014
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Lower chamber liner
    • Patent number D716240
    • Issue date Oct 28, 2014
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Upper chamber liner
    • Patent number D711331
    • Issue date Aug 19, 2014
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents