Shu-Kwan LAU

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Multi-layer EPI chamber body
- Patent number 12,188,148
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Shu-Kwan Lau
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI chamber with full wafer laser heating
- Patent number 12,033,874
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spot heating by moving a beam with horizontal rotary motion
- Patent number 11,842,907
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 11,821,088
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber injector
- Patent number 11,807,931
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear lamp array for improved thermal uniformity and profile control
- Patent number 11,680,338
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Brian Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber injector
- Patent number 11,492,704
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ temperature mapping for epi chamber
- Patent number 11,261,538
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer spot heating with beam width modulation
- Patent number 11,177,144
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liner for epi chamber
- Patent number 11,060,203
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone spot heating in epi
- Patent number 11,021,795
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for gallium nitride deposition
- Patent number 10,995,419
- Issue date May 4, 2021
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI thickness tuning by pulse or profile spot heating
- Patent number 10,770,319
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inject insert for EPI chamber
- Patent number 10,760,161
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Shu-Kwan Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanisms
- Patent number 10,453,733
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow controlled liner having spatially distributed gas passages
- Patent number 10,170,342
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating modulators to improve epi uniformity tuning
- Patent number 10,132,003
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI pre-heat ring
- Patent number 10,047,457
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 9,905,454
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Masato Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow controlled liner having spatially distributed gas passages
- Patent number 9,842,748
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with surface feature for reduced reflection and m...
- Patent number 9,814,099
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Shu-Kwan Lau
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Quartz upper and lower domes
- Patent number 9,768,043
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Anzhong Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow controlled liner having spatially distributed gas passages
- Patent number 9,553,002
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor support shaft with uniformity tuning lenses for EPI process
- Patent number 9,532,401
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Susceptor support shaft for improved wafer temperature uniformity a...
- Patent number 9,123,765
- Issue date Sep 1, 2015
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Lower chamber liner
- Patent number D717746
- Issue date Nov 18, 2014
- Applied Materials, Inc.
- Shu-Kwan Lau
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
JIG FOR ALIGNMENT IN RELATION TO A PROCESS CHAMBER, AND RELATED APP...
- Publication number 20240360560
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Kalaivanan MOHANADASS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR SELECTIVE ETCHING OF AMORPHOUS SILICON OVER E...
- Publication number 20240363374
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Mukhles SOWWAN
- C01 - INORGANIC CHEMISTRY
Information Patent Application
EPI CHAMBER WITH FULL WAFER LASER HEATING
- Publication number 20240339342
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...
- Publication number 20240254627
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER WITH REFLECTOR
- Publication number 20240231042
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...
- Publication number 20240198468
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Aniketnitin PATIL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED AP...
- Publication number 20240175126
- Publication date May 30, 2024
- Applied Materials, Inc.
- Mukhles SOWWAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
- Publication number 20240141498
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE PIECE OR TWO PIECE SUSCEPTOR
- Publication number 20240141493
- Publication date May 2, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER WITH REFLECTOR
- Publication number 20240134151
- Publication date Apr 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR TRANSFER FOR PROCESS CHAMBER
- Publication number 20240105485
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Ribhu GAUTAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20240044004
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240021444
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Manjunath SUBBANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
- Publication number 20230369077
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
AIR SHROUDS WITH INTEGRATED HEAT EXCHANGER
- Publication number 20230341186
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Abraham PALATY
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
BATCH THERMAL PROCESS CHAMBER
- Publication number 20230230859
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Adel George TANNOUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
- Publication number 20230167581
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Kartik Bhupendra SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER INJECTOR
- Publication number 20230027683
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AXISYMMETRIC HEATING ASSEMBLY LAYOUT WITH DOUBLE ENDED LAMP
- Publication number 20220397706
- Publication date Dec 15, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW MASS SUBSTRATE SUPPORT
- Publication number 20220364263
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Shawn Joseph BONHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL DEPOSITION CHAMBER
- Publication number 20220322492
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER EPI CHAMBER BODY
- Publication number 20220195617
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU TEMPERATURE MAPPING FOR EPI CHAMBER
- Publication number 20220090293
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
EPI CHAMBER WITH FULL WAFER LASER HEATING
- Publication number 20220068675
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Shu-Kwan Danny LAU
- H01 - BASIC ELECTRIC ELEMENTS

Shu-Kwan LAU

Person

Patents Grantslast 30 patents

Temperature profile measurement and synchronized control on substra...

Multi-layer EPI chamber body

Multi zone spot heating in EPI

Substrate processing monitoring

Multi-thermal CVD chambers with shared gas delivery and exhaust system

EPI chamber with full wafer laser heating

Spot heating by moving a beam with horizontal rotary motion

Multi zone spot heating in EPI

Chamber injector

Linear lamp array for improved thermal uniformity and profile control

Chamber injector

In-situ temperature mapping for epi chamber

Wafer spot heating with beam width modulation

Liner for epi chamber

Multi zone spot heating in epi

Methods and apparatus for gallium nitride deposition

EPI thickness tuning by pulse or profile spot heating

Inject insert for EPI chamber

Substrate transfer mechanisms

Flow controlled liner having spatially distributed gas passages

Heating modulators to improve epi uniformity tuning

EPI pre-heat ring

Substrate transfer mechanisms

Flow controlled liner having spatially distributed gas passages

Substrate support with surface feature for reduced reflection and m...

Quartz upper and lower domes

Flow controlled liner having spatially distributed gas passages

Susceptor support shaft with uniformity tuning lenses for EPI process

Susceptor support shaft for improved wafer temperature uniformity a...

Lower chamber liner

Patents Applicationslast 30 patents

JIG FOR ALIGNMENT IN RELATION TO A PROCESS CHAMBER, AND RELATED APP...

SYSTEM AND METHOD FOR SELECTIVE ETCHING OF AMORPHOUS SILICON OVER E...

EPI CHAMBER WITH FULL WAFER LASER HEATING

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...

PROCESS CHAMBER WITH REFLECTOR

LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE...

GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED AP...

METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...

SINGLE PIECE OR TWO PIECE SUSCEPTOR

PROCESS CHAMBER WITH REFLECTOR

SUSCEPTOR TRANSFER FOR PROCESS CHAMBER

MULTI ZONE SPOT HEATING IN EPI

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION

AIR SHROUDS WITH INTEGRATED HEAT EXCHANGER

BATCH THERMAL PROCESS CHAMBER

WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER

CHAMBER INJECTOR

AXISYMMETRIC HEATING ASSEMBLY LAYOUT WITH DOUBLE ENDED LAMP

LOW MASS SUBSTRATE SUPPORT

EPITAXIAL DEPOSITION CHAMBER

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

MULTI-LAYER EPI CHAMBER BODY

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

IN-SITU TEMPERATURE MAPPING FOR EPI CHAMBER

EPI CHAMBER WITH FULL WAFER LASER HEATING