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Patents Grants
last 30 patents
Information
Patent Grant
Electrical cleaning tool for wafer polishing tool system
Patent number
12,128,455
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Wen Liu
B08 - CLEANING
Information
Patent Grant
Jets device
Patent number
7,861,944
Issue date
Jan 4, 2011
NATIONAL TAIWAN UNIVERSITY
Ruey-Hor Yen
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240367202
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B24 - GRINDING POLISHING
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240050995
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B08 - CLEANING
Information
Patent Application
JETS DEVICE
Publication number
20090001194
Publication date
Jan 1, 2009
National Taiwan University
Ruey-Hor Yen
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...