Shu Yamamoto

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Kumamoto-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Process-liquid supply mechanism and process-liquid supply method
- Patent number 8,286,482
- Issue date Oct 16, 2012
- Tokyo Electron Limited
- Shu Yamamoto
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND LIQUID DISCHARGE EVALUATI...
- Publication number 20210260612
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS-LIQUID SUPPLY MECHANISM AND PROCESS-LIQUID SUPPLY METHOD
- Publication number 20100037963
- Publication date Feb 18, 2010
- TOKYO ELECTRON LIMITED
- Shu Yamamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL