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MEMS microphone device
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Patent number 9,544,695
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Issue date Jan 10, 2017
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Sensor Tek Co., Ltd.
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Mao-Chen Liu
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Thin film apparatus
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Patent number 9,018,771
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Issue date Apr 28, 2015
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Sensor Tek Co., Ltd.
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Po-Wei Lu
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H01 - BASIC ELECTRIC ELEMENTS
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MEMS apparatus
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Patent number 8,952,464
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Issue date Feb 10, 2015
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Sensor Tek Co., Ltd.
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Mao-Chen Liu
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B81 - MICRO-STRUCTURAL TECHNOLOGY