Shuang Meng

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Processing of semiconductors using vaporized solvents
- Patent number 11,289,323
- Issue date Mar 29, 2022
- Beijing E-Town Semiconductor Co, , Ltd.
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air leak detection in plasma processing apparatus with separation grid
- Patent number 11,039,527
- Issue date Jun 15, 2021
- Mattson Technology, Inc.
- Shuang Meng
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Processing of Semiconductors Using Vaporized Solvents
- Publication number 20220223405
- Publication date Jul 14, 2022
- Beijing E-Town Semiconductor Technology, Co., LTD
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Sur...
- Publication number 20210343506
- Publication date Nov 4, 2021
- Mattson Technology, Inc.
- Ting Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
- Publication number 20210307151
- Publication date Sep 30, 2021
- Mattson Technology, Inc.
- Shuang Meng
- G01 - MEASURING TESTING
Information Patent Application
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
- Publication number 20200245444
- Publication date Jul 30, 2020
- Mattson Technology, Inc.
- Shuang Meng
- G01 - MEASURING TESTING
Information Patent Application
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
- Publication number 20200135554
- Publication date Apr 30, 2020
- Mattson Technology, Inc.
- Li Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing of Semiconductors Using Vaporized Solvents
- Publication number 20190189479
- Publication date Jun 20, 2019
- Mattson Technology, Inc.
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS

Shuang Meng

Person

Patents Grantslast 30 patents

Processing of semiconductors using vaporized solvents

Air leak detection in plasma processing apparatus with separation grid

Patents Applicationslast 30 patents

Processing of Semiconductors Using Vaporized Solvents

Methods And Apparatus For Pulsed Inductively Coupled Plasma For Sur...

Air Leak Detection In Plasma Processing Apparatus With Separation Grid

Air Leak Detection In Plasma Processing Apparatus With Separation Grid

Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask

Processing of Semiconductors Using Vaporized Solvents