Shuang Meng

Person

Billerica, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...
- Patent number 11,560,625
- Issue date Jan 24, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD Mo deposition by using MoOCl4
- Patent number 11,107,675
- Issue date Aug 31, 2021
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature molybdenum film deposition utilizing boron nucleati...
- Patent number 10,453,744
- Issue date Oct 22, 2019
- Entegris, Inc.
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...
- Publication number 20230128330
- Publication date Apr 27, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...
- Publication number 20190226086
- Publication date Jul 25, 2019
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD Mo DEPOSITION BY USING MoOCl4
- Publication number 20180286668
- Publication date Oct 4, 2018
- Entegris, Inc.
- Thomas H. Baum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE MOLYBDENUM FILM DEPOSITION UTILIZING BORON NUCLEATI...
- Publication number 20180261503
- Publication date Sep 13, 2018
- Entegris, Inc.
- Shuang Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MOLYBDENUM FILM DEPOSITION UTILIZING BORON NUCLEATI...
- Publication number 20180142345
- Publication date May 24, 2018
- Entegris, Inc.
- Shuang Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD Mo DEPOSITION BY USING MoOCl4
- Publication number 20180019165
- Publication date Jan 18, 2018
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shuang Meng

Person

Patents Grantslast 30 patents

Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...

CVD Mo deposition by using MoOCl4

Low temperature molybdenum film deposition utilizing boron nucleati...

Patents Applicationslast 30 patents

VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...

VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...

CVD Mo DEPOSITION BY USING MoOCl4

LOW TEMPERATURE MOLYBDENUM FILM DEPOSITION UTILIZING BORON NUCLEATI...

LOW TEMPERATURE MOLYBDENUM FILM DEPOSITION UTILIZING BORON NUCLEATI...

CVD Mo DEPOSITION BY USING MoOCl4