Shuang-Neng Peng

Follow

Person

Taipei, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone conditioner for chemical mechanical polishing system
- Patent number 6,343,977
- Issue date Feb 5, 2002
- Worldwide Semiconductor Manufacturing Corp.
- Shuang-Neng Peng
- B24 - GRINDING POLISHING