Membership
Tour
Register
Log in
Shuang Pi
Follow
Person
Fremont, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Applications
last 30 patents
Information
Patent Application
METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH
Publication number
20230298896
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Gregory Clinton Veber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF MASK CD
Publication number
20230230807
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Beibei Jiang
H01 - BASIC ELECTRIC ELEMENTS