TREA

Shuen-Liang Tseng

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  • Hsinchu City, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Systems and methods for uniform target erosion magnetic assemblies
    • Patent number 11,390,520
    • Issue date Jul 19, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chen-Fang Chung
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Sputter target magnet
    • Patent number 11,322,338
    • Issue date May 3, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Ming-Jie He
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Patterned processing kits for material processing
    • Patent number 9,799,497
    • Issue date Oct 24, 2017
    • Taiwan Semiconductor Manufacturing Company Limited
    • Chen-Fang Chung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTER TARGET MAGNET
    • Publication number 20220223391
    • Publication date Jul 14, 2022
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Ming-Jie HE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER TARGET MAGNET
    • Publication number 20190066988
    • Publication date Feb 28, 2019
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Ming-Jie HE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR UNIFORM TARGET EROSION MAGNETIC ASSEMBLIES
    • Publication number 20190035611
    • Publication date Jan 31, 2019
    • Taiwan Semiconductor Manufactyring Co., Ltd.
    • Chen-Fang Chung
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PATTERNED PROCESSING KITS FOR MATERIAL PROCESSING
    • Publication number 20150047563
    • Publication date Feb 19, 2015
    • Taiwan Semiconductor Manufacturing Company Limited
    • CHEN-FANG CHUNG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Pre-cleaning tool and semiconductor processing apparatus using the...
    • Publication number 20080078326
    • Publication date Apr 3, 2008
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Kuo-Liang Sung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...