Shugo Midorikawa

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, controller and method using test opera...
- Patent number 11,661,669
- Issue date May 30, 2023
- Ebara Corporation
- Kazuma Ideguchi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROLLER FOR SUBSTRATE PROCESSING SY...
- Publication number 20220033989
- Publication date Feb 3, 2022
- EBARA CORPORATION
- Kazuma Ideguchi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR