Shuhei Ogawa

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device and storage medium
- Patent number 8,097,534
- Issue date Jan 17, 2012
- Tokyo Electron Limited
- Shuhei Ogawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Process for etching anti-reflective coating to improve roughness, s...
- Publication number 20100216310
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Andrew W. METZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device and storage medium
- Publication number 20090047794
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Shuhei Ogawa
- H01 - BASIC ELECTRIC ELEMENTS