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Shuhei Takahashi
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Koshi-City, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,770,284
Issue date
Sep 8, 2020
Tokyo Electron Limited
Hiroki Yonekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of treating a microelectronic substrate using dilute TMAH
Patent number
10,256,163
Issue date
Apr 9, 2019
Tokyo Electron Limited
Wallace P. Printz
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
Patent number
10,037,901
Issue date
Jul 31, 2018
Tokyo Electron Limited
Kazuya Koyama
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180182616
Publication date
Jun 28, 2018
TOKYO ELECTRON LIMITED
Hiroki Yonekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF TREATING A MICROELECTRONIC SUBSTRATE USING DILUTE TMAH
Publication number
20170141005
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Wallace P. Printz
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
Publication number
20150328668
Publication date
Nov 19, 2015
TOKYO ELECTRON LIMITED
Kazuya KOYAMA
B08 - CLEANING