Shuhei YABU

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 11,404,237
- Issue date Aug 2, 2022
- HITACHI HIGH-TECH CORPORATION
- Anoru Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,910,194
- Issue date Feb 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,573,489
- Issue date Feb 25, 2020
- Hitachi High-Technologies Corporation
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and installation method
- Patent number 10,008,361
- Issue date Jun 26, 2018
- Hitachi High-Technologies Corporation
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Device
- Publication number 20210384003
- Publication date Dec 9, 2021
- Hitachi High-Tech Corporation
- Anoru SUGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210272768
- Publication date Sep 2, 2021
- Hitachi High-Tech Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF
- Publication number 20200152419
- Publication date May 14, 2020
- Hitachi High-Technologies Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF
- Publication number 20180374673
- Publication date Dec 27, 2018
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSTALLATION METHOD
- Publication number 20170169988
- Publication date Jun 15, 2017
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS