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Shuhei YAMABE

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,984,300
    • Issue date May 14, 2024
    • Tokyo Electron Limited
    • Takehiro Tanikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,978,614
    • Issue date May 7, 2024
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,869,750
    • Issue date Jan 9, 2024
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,715,630
    • Issue date Aug 1, 2023
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,532,461
    • Issue date Dec 20, 2022
    • Tokyo Electron Limited
    • Michishige Saito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 10,847,348
    • Issue date Nov 24, 2020
    • Tokyo Electron Limited
    • Toshiya Tsukahara
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230326724
    • Publication date Oct 12, 2023
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210272779
    • Publication date Sep 2, 2021
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200402775
    • Publication date Dec 24, 2020
    • TOKYO ELECTRON LIMITED
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20200373130
    • Publication date Nov 26, 2020
    • TOKYO ELECTRON LIMITED
    • Takehiro Tanikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20200176226
    • Publication date Jun 4, 2020
    • TOKYO ELECTRON LIMITED
    • Toshiya Tsukahara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200126816
    • Publication date Apr 23, 2020
    • TOKYO ELECTRON LIMITED
    • Michishige Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190348262
    • Publication date Nov 14, 2019
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS