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Shuichi Chikamatsu
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Defect inspection system
Patent number
8,804,109
Issue date
Aug 12, 2014
Hitachi High-Technologies Corporation
Kenji Aiko
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
8,345,233
Issue date
Jan 1, 2013
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection system
Patent number
8,319,960
Issue date
Nov 27, 2012
Hitachi High-Technologies Corporation
Kenji Aiko
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Inspection device and inspection method
Patent number
8,314,930
Issue date
Nov 20, 2012
Hitachi High-Technologies Corporation
Koichi Taniguchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection method and defect inspection apparatus
Patent number
8,228,496
Issue date
Jul 24, 2012
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and apparatus
Patent number
8,134,701
Issue date
Mar 13, 2012
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
8,102,522
Issue date
Jan 24, 2012
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
7,953,567
Issue date
May 31, 2011
Hitachi High-Technologies Corporation
Kei Shimura
G01 - MEASURING TESTING
Information
Patent Grant
Method of detecting defects on an object
Patent number
7,940,383
Issue date
May 10, 2011
Hitachi, Ltd.
Minori Noguchi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Defect inspection method and defect inspection apparatus
Patent number
7,847,927
Issue date
Dec 7, 2010
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device and inspection method
Patent number
7,847,928
Issue date
Dec 7, 2010
Hitachi High-Technologies Corporation
Koichi Taniguchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting apparatus
Patent number
7,733,475
Issue date
Jun 8, 2010
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection system
Patent number
7,733,474
Issue date
Jun 8, 2010
Hitachi High-Technologies Corporation
Kenji Aiko
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Apparatus and method for testing defects
Patent number
7,692,779
Issue date
Apr 6, 2010
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
7,672,799
Issue date
Mar 2, 2010
Hitachi High-Technologies Corporation
Kei Shimura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and method for testing defects
Patent number
7,639,350
Issue date
Dec 29, 2009
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting apparatus
Patent number
7,535,561
Issue date
May 19, 2009
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for testing defects
Patent number
7,443,496
Issue date
Oct 28, 2008
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for testing defects
Patent number
7,098,055
Issue date
Aug 29, 2006
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for testing defects
Patent number
7,037,735
Issue date
May 2, 2006
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Optical apparatus for defect and particle size inspection
Patent number
6,411,377
Issue date
Jun 25, 2002
Hitachi, Ltd.
Minori Noguchi
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION APPARATUS
Publication number
20130194579
Publication date
Aug 1, 2013
Yukihisa Mohara
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION SYSTEM
Publication number
20130182100
Publication date
Jul 18, 2013
Hitachi High-Technologies Corporation
Kenji AIKO
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20130033705
Publication date
Feb 7, 2013
Hitachi High-Technologies Corporation
Koichi TANIGUCHI
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20120140212
Publication date
Jun 7, 2012
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD, AND DEFECT INSPECTION DEVICE
Publication number
20110141463
Publication date
Jun 16, 2011
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20110051131
Publication date
Mar 3, 2011
Hitachi High-Technologies Corporation
Koichi TANIGUCHI
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION SYSTEM
Publication number
20100271473
Publication date
Oct 28, 2010
Hitachi High-Technologies Corporation
Kenji AIKO
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Defect Inspection Method and Defect Inspection Apparatus
Publication number
20100271627
Publication date
Oct 28, 2010
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING APPARATUS
Publication number
20100214561
Publication date
Aug 26, 2010
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
Defect Inspection Apparatus and Defect Inspection Method
Publication number
20100106443
Publication date
Apr 29, 2010
Hitachi High-Technologies Corporation
Kei SHIMURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Apparatus And Method For Testing Defects
Publication number
20100088042
Publication date
Apr 8, 2010
Minori NOGUCHI
G01 - MEASURING TESTING
Information
Patent Application
Inspection apparatus and inspection method
Publication number
20090262339
Publication date
Oct 22, 2009
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTING APPARATUS
Publication number
20090207405
Publication date
Aug 20, 2009
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
Publication number
20090059216
Publication date
Mar 5, 2009
Yukihiro Shibata
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20080297779
Publication date
Dec 4, 2008
Koichi TANIGUCHI
G01 - MEASURING TESTING
Information
Patent Application
INSPECTING DEVICE AND INSPECTING METHOD
Publication number
20080297786
Publication date
Dec 4, 2008
Hitachi High-Technologies Corporation
Hideki Fukushima
G01 - MEASURING TESTING
Information
Patent Application
Defect inspection system
Publication number
20080291436
Publication date
Nov 27, 2008
Kenji Aiko
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Defect Inspection Method and Defect Inspection Apparatus
Publication number
20080204736
Publication date
Aug 28, 2008
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
Defect Inspection Apparatus and Defect Inspection Method
Publication number
20080059094
Publication date
Mar 6, 2008
Hitachi High-Technologies Corporation
Kei SHIMURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Defect inspecting apparatus
Publication number
20070216896
Publication date
Sep 20, 2007
Hitachi High-Technologies Corporation
Shuichi Chikamatsu
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
Publication number
20070146696
Publication date
Jun 28, 2007
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
Publication number
20070146697
Publication date
Jun 28, 2007
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for testing defects
Publication number
20060030060
Publication date
Feb 9, 2006
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for testing defects
Publication number
20060030059
Publication date
Feb 9, 2006
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for testing defects
Publication number
20020168787
Publication date
Nov 14, 2002
Minori Noguchi
B82 - NANO-TECHNOLOGY