Shuichi Nakagawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vehicle body structure
- Patent number 12,043,318
- Issue date Jul 23, 2024
- SUBARU CORPORATION
- Shuichi Nakagawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ventilated semiconductor processing apparatus
- Patent number 12,014,897
- Issue date Jun 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration damping system for charged particle beam apparatus
- Patent number 11,664,185
- Issue date May 30, 2023
- HITACHI HIGH-TECH CORPORATION
- Jun Etoh
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Charged particle beam device
- Patent number 11,380,515
- Issue date Jul 5, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hosobuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, sample alignment method of charged...
- Patent number 11,342,156
- Issue date May 24, 2022
- HITACHI HIGH-TECH CORPORATION
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 11,049,687
- Issue date Jun 29, 2021
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Stage apparatus, and charged particle beam apparatus
- Patent number 10,879,033
- Issue date Dec 29, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device
- Patent number 10,840,059
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Kentaro Shigeoka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vehicle panel structure
- Patent number 10,800,461
- Issue date Oct 13, 2020
- SUBARU CORPORATION
- Shuichi Nakagawa
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Charged particle beam apparatus comprising a controller to set cont...
- Patent number 10,804,067
- Issue date Oct 13, 2020
- HITACHI HIGH-TECH CORPORATION
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,770,259
- Issue date Sep 8, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,658,151
- Issue date May 19, 2020
- HITACHI HIGH-TECH CORPORATION
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,600,614
- Issue date Mar 24, 2020
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration-suppressing mechanism to be attached to charged particle...
- Patent number 10,591,018
- Issue date Mar 17, 2020
- Hitachi High-Technologies Corporation
- Hiroki Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam device
- Patent number 10,586,676
- Issue date Mar 10, 2020
- Hitachi High-Technologies Corporation
- Takanori Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 10,366,912
- Issue date Jul 30, 2019
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and sample elevating apparatus
- Patent number 10,153,128
- Issue date Dec 11, 2018
- Hitachi High-Technologies Corporation
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus with braking system for lens, beam, or vibration co...
- Patent number 9,905,393
- Issue date Feb 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device using the same
- Patent number 9,887,064
- Issue date Feb 6, 2018
- Hitachi High-Technologies Corporation
- Akira Nishioka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Charged particle radiation apparatus
- Patent number 9,734,983
- Issue date Aug 15, 2017
- Hitachi High-Technologies Corporation
- Daisuke Mutou
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Apparatus and method for processing sample, and charged particle ra...
- Patent number 9,666,408
- Issue date May 30, 2017
- Hitachi High-Technologies Corporation
- Shuichi Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam apparatus using the stage de...
- Patent number 9,627,173
- Issue date Apr 18, 2017
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, stage controlling method, and stag...
- Patent number 9,502,208
- Issue date Nov 22, 2016
- Hitachi High-Technologies Corporation
- Masaki Mizuochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus, and charged particle beam apparatus using same
- Patent number 9,368,320
- Issue date Jun 14, 2016
- Hitachi High-Technologies Corporation
- Akira Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample positioning apparatus, sample stage, and charged particle be...
- Patent number 8,946,652
- Issue date Feb 3, 2015
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus having noise absorbing arrangements
- Patent number 8,822,952
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Daisuke Muto
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and evaluation method using the charge...
- Patent number 8,653,455
- Issue date Feb 18, 2014
- Hitachi High-Technologies Corporation
- Hiroyuki Kitsunai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample stage apparatus and method of controlling the same
- Patent number 8,174,229
- Issue date May 8, 2012
- Hitachi High-Technologies Corporation
- Masashi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen stage apparatus and specimen stage positioning control method
- Patent number 8,076,651
- Issue date Dec 13, 2011
- Hitachi High-Technologies Corporation
- Masahiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD
- Publication number 20240385539
- Publication date Nov 21, 2024
- HITACHI HIGH-TECH CORPORATION
- Akira NISHIOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage Device, Charged Particle Beam Device, and Vacuum Device
- Publication number 20240258063
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230215684
- Publication date Jul 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230139507
- Publication date May 4, 2023
- HITACHI HIGH-TECH CORPORATION
- Shiano ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Vibration-Suppressing Mechanism
- Publication number 20230035686
- Publication date Feb 2, 2023
- Hitachi High-Tech Corporation
- Hiroki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VEHICLE BODY STRUCTURE
- Publication number 20220314359
- Publication date Oct 6, 2022
- SUBARU CORPORATION
- Shuichi Nakagawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220208505
- Publication date Jun 30, 2022
- HITACHI HIGH-TECH CORPORATION
- Jun ETOH
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Stage Movement Control Apparatus and Charged Particle Beam System
- Publication number 20220148845
- Publication date May 12, 2022
- Hitachi High-Tech Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Processing Apparatus
- Publication number 20220076918
- Publication date Mar 10, 2022
- HITACHI HIGH-TECH CORPORATION
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...
- Publication number 20210265129
- Publication date Aug 26, 2021
- HITACHI HIGH-TECH CORPORATION
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20210066025
- Publication date Mar 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Keiichiro HOSOBUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200176217
- Publication date Jun 4, 2020
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190378678
- Publication date Dec 12, 2019
- Hitachi High-Technologies Corporation
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Radiation Device
- Publication number 20190311876
- Publication date Oct 10, 2019
- Hitachi High-Technologies Corporation
- Kentaro SHIGEOKA
- G05 - CONTROLLING REGULATING
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190259567
- Publication date Aug 22, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190252151
- Publication date Aug 15, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190228947
- Publication date Jul 25, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION-SUPPRESSING MECHANISM TO BE ATTACHED TO CHARGED PARTICLE...
- Publication number 20190145490
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Hiroki TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190108970
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Takanori KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20190103246
- Publication date Apr 4, 2019
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VEHICLE PANEL STRUCTURE
- Publication number 20180346038
- Publication date Dec 6, 2018
- SUBARU CORPORATION
- Shuichi NAKAGAWA
- B60 - VEHICLES IN GENERAL
Information Patent Application
Stage Apparatus and Charged Particle Beam Apparatus
- Publication number 20180247855
- Publication date Aug 30, 2018
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ELEVATING APPARATUS
- Publication number 20180138009
- Publication date May 17, 2018
- Hitachi High-Technologies Corporation
- Masakazu SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Radiation Apparatus
- Publication number 20170061947
- Publication date Mar 2, 2017
- Hitachi High-Technologies Corporation
- Daisuke MUTOU
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
Stage Device and Charged Particle Beam Device Using the Same
- Publication number 20160365219
- Publication date Dec 15, 2016
- Hitachi High-Technologies Corporation
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...
- Publication number 20160284506
- Publication date Sep 29, 2016
- Hitachi High-Technologies Corporation
- Hironori OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus, Stage Controlling Method, and Stag...
- Publication number 20160005568
- Publication date Jan 7, 2016
- Hitachi High-Technologies Corporation
- Masaki MIZUOCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Processing Sample, and Charged Particle Ra...
- Publication number 20150340198
- Publication date Nov 26, 2015
- Hitachi High-Technologies Corporation
- Shuichi NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device and Charged Particle Beam Apparatus Using the Stage De...
- Publication number 20150248991
- Publication date Sep 3, 2015
- Hironori OGAWA
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS USING SAME
- Publication number 20150053857
- Publication date Feb 26, 2015
- Hitachi High-Technologies Corporation
- Akira NISHIOKA
- H01 - BASIC ELECTRIC ELEMENTS

Shuichi Nakagawa

Person

Patents Grantslast 30 patents

Vehicle body structure

Ventilated semiconductor processing apparatus

Vibration damping system for charged particle beam apparatus

Charged particle beam device

Charged particle beam apparatus, sample alignment method of charged...

Stage apparatus and charged particle beam apparatus

Stage apparatus, and charged particle beam apparatus

Charged particle radiation device

Vehicle panel structure

Charged particle beam apparatus comprising a controller to set cont...

Stage device and charged particle beam device

Stage device and charged particle beam device

Stage device and charged particle beam device

Vibration-suppressing mechanism to be attached to charged particle...

Charged particle beam device

Stage apparatus and charged particle beam apparatus

Charged particle beam apparatus and sample elevating apparatus

Stage apparatus with braking system for lens, beam, or vibration co...

Stage device and charged particle beam device using the same

Charged particle radiation apparatus

Apparatus and method for processing sample, and charged particle ra...

Stage device and charged particle beam apparatus using the stage de...

Charged particle beam apparatus, stage controlling method, and stag...

Stage apparatus, and charged particle beam apparatus using same

Sample positioning apparatus, sample stage, and charged particle be...

Charged particle beam apparatus having noise absorbing arrangements

Stage device

Charged particle beam device and evaluation method using the charge...

Sample stage apparatus and method of controlling the same

Specimen stage apparatus and specimen stage positioning control method

Patents Applicationslast 30 patents

IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD

Stage Device, Charged Particle Beam Device, and Vacuum Device

STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam Device and Vibration-Suppressing Mechanism

VEHICLE BODY STRUCTURE

VIBRATION DAMPING SYSTEM FOR CHARGED PARTICLE BEAM APPARATUS

Stage Movement Control Apparatus and Charged Particle Beam System

Semiconductor Processing Apparatus

CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...

Charged Particle Beam Device

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS

Charged Particle Radiation Device

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

VIBRATION-SUPPRESSING MECHANISM TO BE ATTACHED TO CHARGED PARTICLE...

CHARGED PARTICLE BEAM DEVICE

STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE

VEHICLE PANEL STRUCTURE

Stage Apparatus and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ELEVATING APPARATUS

Charged Particle Radiation Apparatus

Stage Device and Charged Particle Beam Device Using the Same

Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...

Charged Particle Beam Apparatus, Stage Controlling Method, and Stag...

Apparatus and Method for Processing Sample, and Charged Particle Ra...

Stage Device and Charged Particle Beam Apparatus Using the Stage De...

STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS USING SAME