Shuichi Nishikido

Follow

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 9,120,120
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 8,851,092
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...
- Publication number 20140352736
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...
- Publication number 20090202951
- Publication date Aug 13, 2009
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY