Shuichi SUEMASA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding and rotation mechanism and substrate processing a...
- Patent number 11,837,482
- Issue date Dec 5, 2023
- Ebara Corporation
- Shuichi Suemasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig for attaching and detaching cleaning member
- Patent number 11,524,322
- Issue date Dec 13, 2022
- Ebara Corporation
- Tomoaki Fujimoto
- B08 - CLEANING
Information Patent Grant
Break-in apparatus, break-in system and storage media
- Patent number 11,004,701
- Issue date May 11, 2021
- Ebara Corporation
- Shuichi Suemasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-cleaning device and substrate processing apparatus
- Patent number 10,751,761
- Issue date Aug 25, 2020
- Ebara Corporation
- Shuichi Suemasa
- B08 - CLEANING
Information Patent Grant
Polishing table replacement apparatus, polishing table replacement...
- Patent number 9,908,212
- Issue date Mar 6, 2018
- Ebara Corporation
- Shuichi Suemasa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING DEVICE AND METHOD FOR DETECTING WEAR IN SUBSTRATE...
- Publication number 20240402054
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
- Publication number 20240383011
- Publication date Nov 21, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
- Publication number 20240082885
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
- Publication number 20220203411
- Publication date Jun 30, 2022
- EBARA CORPORATION
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING AND ROTATION MECHANISM AND SUBSTRATE PROCESSING A...
- Publication number 20220059378
- Publication date Feb 24, 2022
- EBARA CORPORATION
- Shuichi SUEMASA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG FOR ATTACHING AND DETACHING CLEANING MEMBER
- Publication number 20200391258
- Publication date Dec 17, 2020
- EBARA CORPORATION
- TOMOAKI FUJIMOTO
- B08 - CLEANING
Information Patent Application
BREAK-IN APPARATUS, BREAK-IN SYSTEM AND STORAGE MEDIA
- Publication number 20190088509
- Publication date Mar 21, 2019
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SELF-CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180250717
- Publication date Sep 6, 2018
- EBARA CORPORATION
- Shuichi Suemasa
- B08 - CLEANING
Information Patent Application
POLISHING TABLE REPLACEMENT APPARATUS, POLISHING TABLE REPLACEMENT...
- Publication number 20170151649
- Publication date Jun 1, 2017
- EBARA CORPORATION
- Shuichi SUEMASA
- B24 - GRINDING POLISHING

Shuichi SUEMASA

Person

Patents Grantslast 30 patents

Substrate holding and rotation mechanism and substrate processing a...

Jig for attaching and detaching cleaning member

Break-in apparatus, break-in system and storage media

Self-cleaning device and substrate processing apparatus

Polishing table replacement apparatus, polishing table replacement...

Patents Applicationslast 30 patents

SUBSTRATE HOLDING DEVICE AND METHOD FOR DETECTING WEAR IN SUBSTRATE...

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...

SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE

SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE

SUBSTRATE HOLDING AND ROTATION MECHANISM AND SUBSTRATE PROCESSING A...

JIG FOR ATTACHING AND DETACHING CLEANING MEMBER

BREAK-IN APPARATUS, BREAK-IN SYSTEM AND STORAGE MEDIA

SELF-CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS

POLISHING TABLE REPLACEMENT APPARATUS, POLISHING TABLE REPLACEMENT...