Shuichi Tamamushi

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam pattern writing method and charged particle b...
- Patent number 9,343,266
- Issue date May 17, 2016
- Nuflare Technology, Inc.
- Munehiro Ogasawara
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM PATTERN WRITING METHOD AND CHARGED PARTICLE B...
- Publication number 20140061499
- Publication date Mar 6, 2014
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- B82 - NANO-TECHNOLOGY