Shuichi Yasuda

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,881,417
- Issue date Jan 23, 2024
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,823,921
- Issue date Nov 21, 2023
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,404,292
- Issue date Aug 2, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,101,147
- Issue date Aug 24, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,933,448
- Issue date Mar 2, 2021
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, processing liquid draining method,...
- Patent number 10,861,717
- Issue date Dec 8, 2020
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,741,422
- Issue date Aug 11, 2020
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,636,682
- Issue date Apr 28, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B08 - CLEANING
Information Patent Grant
Substrate treatment method of treating substrate, and substrate tre...
- Patent number 10,553,422
- Issue date Feb 4, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- B08 - CLEANING
Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,687,886
- Issue date Jun 27, 2017
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,059,221
- Issue date Jun 16, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,932,672
- Issue date Jan 13, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,894,775
- Issue date Nov 25, 2014
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,585,830
- Issue date Nov 19, 2013
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,540,824
- Issue date Sep 24, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,496,761
- Issue date Jul 30, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 8,356,424
- Issue date Jan 22, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with multi-speed drying having rinse...
- Patent number 8,218,124
- Issue date Jul 10, 2012
- Sokudo Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,040,488
- Issue date Oct 18, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,034,190
- Issue date Oct 11, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 7,604,424
- Issue date Oct 20, 2009
- Sokudo Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 7,600,522
- Issue date Oct 13, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masanobu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,497,633
- Issue date Mar 3, 2009
- Sokudo Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240096651
- Publication date Mar 21, 2024
- SCREEN Holdings Co., Ltd.
- Shuichi YASUDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220331845
- Publication date Oct 20, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210331192
- Publication date Oct 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20200227285
- Publication date Jul 16, 2020
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190371628
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Shuichi YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING LIQUID DRAINING METHOD,...
- Publication number 20190267260
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262851
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190176179
- Publication date Jun 13, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190172733
- Publication date Jun 6, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20180169712
- Publication date Jun 21, 2018
- SCREEN Holdings Co., Ltd.
- Shuichi YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD OF TREATING SUBSTRATE, AND SUBSTRATE TRE...
- Publication number 20180090308
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170271177
- Publication date Sep 21, 2017
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160203997
- Publication date Jul 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150217335
- Publication date Aug 6, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro GOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140120477
- Publication date May 1, 2014
- Sokudo Co., Ltd.
- Shuichi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...
- Publication number 20120037593
- Publication date Feb 16, 2012
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100285225
- Publication date Nov 11, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Koji Kaneyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100239986
- Publication date Sep 23, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100190116
- Publication date Jul 29, 2010
- SOKUDO CO., LTD.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100159142
- Publication date Jun 24, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100136492
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100136257
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100129526
- Publication date May 27, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100075054
- Publication date Mar 25, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20090165828
- Publication date Jul 2, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Masanobu Sato
- H01 - BASIC ELECTRIC ELEMENTS

Shuichi Yasuda

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate treatment apparatus and substrate treatment method

Substrate processing apparatus, processing liquid draining method,...

Substrate processing method and substrate processing apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus

Substrate treatment method of treating substrate, and substrate tre...

Substrate processing method for drying a substrate by discharging g...

Substrate processing apparatus

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus with multi-speed drying having rinse...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING LIQUID DRAINING METHOD,...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE TREATMENT METHOD OF TREATING SUBSTRATE, AND SUBSTRATE TRE...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS