Shuichiro Fukutome

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged-particle beam drawing apparatus and vibration damping mecha...
- Patent number 9,431,208
- Issue date Aug 30, 2016
- NuFlare Technology, Inc.
- Shuichiro Fukutome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Move mechanism for moving target object and charged particle beam w...
- Patent number 8,277,603
- Issue date Oct 2, 2012
- NuFlare Technology, Inc.
- Shuichi Tamamushi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam pattern writing method and apparatus and soft...
- Patent number 7,589,335
- Issue date Sep 15, 2009
- Nuflare Technology, Inc.
- Takuya Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED-PARTICLE BEAM DRAWING APPARATUS AND VIBRATION DAMPING MECHA...
- Publication number 20160056009
- Publication date Feb 25, 2016
- NuFlare Technology, Inc.
- Shuichiro FUKUTOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...
- Publication number 20080011965
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Takuya Matsukawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
Move mechanism for moving target object and charged particle beam w...
- Publication number 20070152169
- Publication date Jul 5, 2007
- NuFLARE TECHNOLOGY, INC.
- Shuichi Tamamushi
- B82 - NANO-TECHNOLOGY