Shuichiro Kanai

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Saitama-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase-shift photo mask blank, phase-shift photo mask and method for...
- Patent number 6,569,577
- Issue date May 27, 2003
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY