Shuichiro SAKAI

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,996,296
- Issue date May 28, 2024
- Tokyo Electron Limited
- Kae Kumagai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226210
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250224676
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250188604
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240194456
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230128868
- Publication date Apr 27, 2023
- Tokyo Electron Limited
- Hiroki MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220157616
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Kae KUMAGAI
- H01 - BASIC ELECTRIC ELEMENTS

Shuichiro SAKAI

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing system

Patents Applicationslast 30 patents

FILM FORMATION METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

BORON NITRIDE FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM