Shuji Akiyama

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection apparatus
- Patent number 11,515,175
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Shuji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 10,823,778
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Prober for inspecting semiconductor devices formed on semiconductor...
- Patent number 9,684,014
- Issue date Jun 20, 2017
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Prober and needle-tip polishing device for probe card
- Patent number 9,383,389
- Issue date Jul 5, 2016
- Tokyo Electron Limited
- Kazuya Yano
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer chuck inclination correcting method and probe apparatus
- Patent number 8,866,503
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kazunari Ishii
- G01 - MEASURING TESTING
Information Patent Grant
Probing apparatus and probing method
- Patent number 8,310,261
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Hiroki Hosaka
- G01 - MEASURING TESTING
Information Patent Grant
Heavy object turning apparatus
- Patent number 8,007,389
- Issue date Aug 30, 2011
- Nabtesco Corporation
- Toshihiro Yudate
- G01 - MEASURING TESTING
Information Patent Grant
Processing apparatus
- Patent number 7,887,280
- Issue date Feb 15, 2011
- Tokyo Electron Limited
- Hiroki Hosaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Turning device for heavy object
- Patent number 7,794,350
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Shuji Akiyama
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Probe apparatus
- Patent number 7,741,837
- Issue date Jun 22, 2010
- Tokyo Electron Limited
- Tadashi Obikane
- G01 - MEASURING TESTING
Information Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
- Patent number 7,701,236
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Wafer carrying-in/out apparatus
- Patent number D607424
- Issue date Jan 5, 2010
- Tokyo Electron Limited
- Hiroki Hosaka
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Wafer carrying-in/out apparatus
- Patent number D602882
- Issue date Oct 27, 2009
- Tokyo Electron Limited
- Hiroki Hosaka
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Probing apparatus and probing method
- Patent number 7,583,096
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Hiroki Hosaka
- G01 - MEASURING TESTING
Information Patent Grant
Wafer carrying-in/out machine
- Patent number D592230
- Issue date May 12, 2009
- Tokyo Electron Limited
- Hiroki Hosaka
- D15 - Machines not elsewhere specified
Information Patent Grant
Conveyance method for transporting objects
- Patent number 7,457,680
- Issue date Nov 25, 2008
- Tokyo Electron Limited
- Shuji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work convey system, unmanned convey vehicle system, unmanned convey...
- Patent number 7,283,890
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Toshihiko Iijima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Centering mechanism, centering unit, semiconductor manufacturing ap...
- Patent number 7,153,087
- Issue date Dec 26, 2006
- Samsung Electronics Co., Ltd.
- Ki Sang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated guided vehicle
- Patent number 7,153,079
- Issue date Dec 26, 2006
- Murata Kikai Kabushiki Kaisha
- Ken Miyano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic guided vehicle, automatic guided vehicle system and wafer...
- Patent number 7,044,703
- Issue date May 16, 2006
- Murata Kikai Kabushiki Kaisha
- Isao Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cassette
- Patent number 6,874,638
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system, wafer transfer method and automatic guided v...
- Patent number 6,721,626
- Issue date Apr 13, 2004
- Tokyo Electron Limited
- Masaru Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for testing semiconductor device
- Patent number 5,801,527
- Issue date Sep 1, 1998
- Tokyo Electron Limited
- Takao Ishii
- G01 - MEASURING TESTING
Information Patent Grant
Probe system
- Patent number 5,798,651
- Issue date Aug 25, 1998
- Tokyo Electron Limited
- Tsuyoshi Aruga
- G01 - MEASURING TESTING
Information Patent Grant
Method of testing electrical characteristics of LCD with probe device
- Patent number 4,899,105
- Issue date Feb 6, 1990
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION APPARATUS
- Publication number 20200168481
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Shuji AKIYAMA
- F24 - HEATING RANGES VENTILATING
Information Patent Application
INSPECTION SYSTEM
- Publication number 20190041454
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Shuji AKIYAMA
- G01 - MEASURING TESTING
Information Patent Application
PROBER
- Publication number 20150226767
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Application
PROBER AND NEEDLE-TIP POLISHING DEVICE FOR PROBE CARD
- Publication number 20150204909
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Kazuya Yano
- G01 - MEASURING TESTING
Information Patent Application
WAFER CHUCK INCLINATION CORRECTING METHOD AND PROBE APPARATUS
- Publication number 20110234247
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Kazunari ISHII
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART...
- Publication number 20100310351
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Shuji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBING APPARATUS AND PROBING METHOD
- Publication number 20090267626
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Hiroki HOSAKA
- G01 - MEASURING TESTING
Information Patent Application
Heavy Object Turning Apparatus
- Publication number 20080298948
- Publication date Dec 4, 2008
- Tokyo Electron Limited
- Toshihiro Yudate
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS
- Publication number 20080290886
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS
- Publication number 20080284455
- Publication date Nov 20, 2008
- TOKYO ELECTRON LIMITED
- Tadashi OBIKANE
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING APPARATUS
- Publication number 20070264104
- Publication date Nov 15, 2007
- TOKYO ELECTRON LIMITED
- Hiroki HOSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBING APPARATUS AND PROBING METHOD
- Publication number 20070262783
- Publication date Nov 15, 2007
- TOKYO ELECTRON LIMITED
- Hiroki HOSAKA
- G01 - MEASURING TESTING
Information Patent Application
Turning device for heavy object
- Publication number 20070258799
- Publication date Nov 8, 2007
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART...
- Publication number 20070231110
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Shuji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE METHOD FOR TRANSPORTING OBJECTS
- Publication number 20070150085
- Publication date Jun 28, 2007
- Shuji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conveyance system, conveyance method and vacuum holding apparatus f...
- Publication number 20050209725
- Publication date Sep 22, 2005
- Shuji Akiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Inspection apparatus
- Publication number 20050035311
- Publication date Feb 17, 2005
- Jin Asakawa
- G02 - OPTICS
Information Patent Application
Work convey system, unmanned coney vehicle system, unmanned convey...
- Publication number 20040234362
- Publication date Nov 25, 2004
- Toshihiko Iijima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Automated guided vehicle
- Publication number 20040052624
- Publication date Mar 18, 2004
- Ken Miyano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conveyance system, conveyance method and vacuum holding apparatus f...
- Publication number 20040046545
- Publication date Mar 11, 2004
- Shuji Akiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Centering mechanism, centering unit, semiconductor manufacturing ap...
- Publication number 20030160401
- Publication date Aug 28, 2003
- Ki Sang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer cassette
- Publication number 20030122146
- Publication date Jul 3, 2003
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer transfer system, wafer transfer method and automatic guided v...
- Publication number 20030023343
- Publication date Jan 30, 2003
- Murata Kikai Kabushiki Kaisha
- Masaru Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic guided vehicle, automatic guided vehicle system and wafer...
- Publication number 20020154974
- Publication date Oct 24, 2002
- Murata Kikai Kabushiki Kaisha
- Isao Fukuda
- H01 - BASIC ELECTRIC ELEMENTS

Shuji Akiyama

Person

Patents Grantslast 30 patents

Wafer inspection apparatus

Inspection system

Prober for inspecting semiconductor devices formed on semiconductor...

Prober and needle-tip polishing device for probe card

Wafer chuck inclination correcting method and probe apparatus

Probing apparatus and probing method

Heavy object turning apparatus

Processing apparatus

Turning device for heavy object

Probe apparatus

Each inspection units of a probe apparatus is provided with an imag...

Wafer carrying-in/out apparatus

Wafer carrying-in/out apparatus

Probing apparatus and probing method

Wafer carrying-in/out machine

Conveyance method for transporting objects

Work convey system, unmanned convey vehicle system, unmanned convey...

Centering mechanism, centering unit, semiconductor manufacturing ap...

Automated guided vehicle

Automatic guided vehicle, automatic guided vehicle system and wafer...

Wafer cassette

Wafer transfer system, wafer transfer method and automatic guided v...

Apparatus and method for testing semiconductor device

Probe system

Method of testing electrical characteristics of LCD with probe device

Patents Applicationslast 30 patents

WAFER INSPECTION APPARATUS

INSPECTION SYSTEM

PROBER

PROBER AND NEEDLE-TIP POLISHING DEVICE FOR PROBE CARD

WAFER CHUCK INCLINATION CORRECTING METHOD AND PROBE APPARATUS

METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART...

PROBING APPARATUS AND PROBING METHOD

Heavy Object Turning Apparatus

PROBE APPARATUS

PROBE APPARATUS

PROCESSING APPARATUS

PROBING APPARATUS AND PROBING METHOD

Turning device for heavy object

METHOD FOR HANDLING AND TRANSFERRING A WAFER CASE, AND HOLDING PART...

CONVEYANCE METHOD FOR TRANSPORTING OBJECTS

Conveyance system, conveyance method and vacuum holding apparatus f...

Inspection apparatus

Work convey system, unmanned coney vehicle system, unmanned convey...

Automated guided vehicle

Conveyance system, conveyance method and vacuum holding apparatus f...

Centering mechanism, centering unit, semiconductor manufacturing ap...

Wafer cassette

Wafer transfer system, wafer transfer method and automatic guided v...

Automatic guided vehicle, automatic guided vehicle system and wafer...