Shuji Iwanaga

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate defect inspection apparatus, substrate defect inspection...
- Patent number 11,636,585
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate defect inspection apparatus, substrate defect inspection...
- Patent number 11,227,381
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate defect inspection apparatus, substrate defect inspection...
- Patent number 10,818,004
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Film thickness measurement apparatus, film thickness measurement me...
- Patent number 9,355,442
- Issue date May 31, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect analyzing apparatus, substrate processing system, defect ana...
- Patent number 9,342,880
- Issue date May 17, 2016
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Setting method of exposure apparatus, substrate imaging apparatus a...
- Patent number 9,229,337
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Shinobu Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate reference image creation method, substrate defect inspect...
- Patent number 9,146,479
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Izumi Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection device, bonding system and inspection method
- Patent number 9,097,681
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Shinji Koga
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 9,039,863
- Issue date May 26, 2015
- Tokyo Electron Limited
- Shuhei Matsumoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Process monitoring device and process monitoring method in semicond...
- Patent number 8,989,477
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Yasutoshi Umehara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image processing method, image display method, image processing app...
- Patent number 8,873,849
- Issue date Oct 28, 2014
- Tokyo Electron Limited
- Shuji Iwanaga
- G01 - MEASURING TESTING
Information Patent Grant
Temperature setting method of heat processing plate, temperature se...
- Patent number 8,874,254
- Issue date Oct 28, 2014
- Tokyo Electron Limited
- Shuji Iwanaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect classification method, computer storage medium, and defect c...
- Patent number 8,379,965
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Shuji Iwanaga
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method, defect inspecting apparatus, and storage...
- Patent number 8,311,316
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate inspection system and storag...
- Patent number 8,212,869
- Issue date Jul 3, 2012
- Tokyo Electron Limited
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Temperature setting method of heat processing plate, temperature se...
- Patent number 8,014,895
- Issue date Sep 6, 2011
- Tokyo Electron Limited
- Shuji Iwanaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting extraneous matter on heat processing plate, hea...
- Patent number 7,815,366
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Kouji Okamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION SYSTEM, AND SUBST...
- Publication number 20220237770
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...
- Publication number 20220101517
- Publication date Mar 31, 2022
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...
- Publication number 20200402225
- Publication date Dec 24, 2020
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...
- Publication number 20190220972
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILM THICKNESS MEASUREMENT APPARATUS, FILM THICKNESS MEASUREMENT ME...
- Publication number 20150324970
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...
- Publication number 20150125068
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...
- Publication number 20140160451
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Izumi HASEGAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, SUBSTRATE DEFECT INSPECTION APP...
- Publication number 20140152807
- Publication date Jun 5, 2014
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD
- Publication number 20140054463
- Publication date Feb 27, 2014
- TOKYO ELECTRON LIMITED
- Shinji KOGA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD
- Publication number 20140055599
- Publication date Feb 27, 2014
- TOKYO ELECTRON LIMITED
- Shinji KOGA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20130334172
- Publication date Dec 19, 2013
- TOKYO ELECTRON LIMITED
- Shuhei Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...
- Publication number 20130236088
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SETTING METHOD OF EXPOSURE APPARATUS, SUBSTRATE IMAGING APPARATUS A...
- Publication number 20130088696
- Publication date Apr 11, 2013
- TOKYO ELECTRON LIMITED
- Shinobu MIYAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE PROCESSING METHOD, IMAGE DISPLAY METHOD, IMAGE PROCESSING APP...
- Publication number 20120328194
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SE...
- Publication number 20110270465
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Shuji Iwanaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CLASSIFICATION METHOD, COMPUTER STORAGE MEDIUM, AND DEFECT C...
- Publication number 20110007961
- Publication date Jan 13, 2011
- Shuji Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTING METHOD, DEFECT INSPECTING APPARATUS, AND STORAGE...
- Publication number 20100266195
- Publication date Oct 21, 2010
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAG...
- Publication number 20100141755
- Publication date Jun 10, 2010
- TOKYO ELECTRON LIMITED
- Shuji IWANAGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SE...
- Publication number 20090254226
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Shuji Iwanaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEA...
- Publication number 20090076763
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Kouji Okamura
- H01 - BASIC ELECTRIC ELEMENTS

Shuji Iwanaga

Person

Patents Grantslast 30 patents

Substrate defect inspection apparatus, substrate defect inspection...

Substrate defect inspection apparatus, substrate defect inspection...

Substrate defect inspection apparatus, substrate defect inspection...

Film thickness measurement apparatus, film thickness measurement me...

Defect analyzing apparatus, substrate processing system, defect ana...

Setting method of exposure apparatus, substrate imaging apparatus a...

Substrate reference image creation method, substrate defect inspect...

Inspection device, bonding system and inspection method

Substrate processing apparatus, substrate processing method, and co...

Process monitoring device and process monitoring method in semicond...

Image processing method, image display method, image processing app...

Temperature setting method of heat processing plate, temperature se...

Defect classification method, computer storage medium, and defect c...

Defect inspecting method, defect inspecting apparatus, and storage...

Substrate inspection method, substrate inspection system and storag...

Temperature setting method of heat processing plate, temperature se...

Method of detecting extraneous matter on heat processing plate, hea...

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION SYSTEM, AND SUBST...

SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...

SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...

SUBSTRATE DEFECT INSPECTION APPARATUS, SUBSTRATE DEFECT INSPECTION...

FILM THICKNESS MEASUREMENT APPARATUS, FILM THICKNESS MEASUREMENT ME...

DEFECT ANALYZING APPARATUS, SUBSTRATE PROCESSING SYSTEM, DEFECT ANA...

SUBSTRATE REFERENCE IMAGE CREATION METHOD, SUBSTRATE DEFECT INSPECT...

SUBSTRATE DEFECT INSPECTION METHOD, SUBSTRATE DEFECT INSPECTION APP...

INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD

INSPECTION DEVICE, BONDING SYSTEM AND INSPECTION METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...

SETTING METHOD OF EXPOSURE APPARATUS, SUBSTRATE IMAGING APPARATUS A...

IMAGE PROCESSING METHOD, IMAGE DISPLAY METHOD, IMAGE PROCESSING APP...

TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SE...

DEFECT CLASSIFICATION METHOD, COMPUTER STORAGE MEDIUM, AND DEFECT C...

DEFECT INSPECTING METHOD, DEFECT INSPECTING APPARATUS, AND STORAGE...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAG...

TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SE...

METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEA...