Shuji Kodaira

Person

Susono-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,337,092
- Issue date May 10, 2016
- Ulvac, Inc.
- Junichi Hamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 9,005,413
- Issue date Apr 14, 2015
- Ulvac, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method and manufacturing apparatus of device
- Patent number 8,883,632
- Issue date Nov 11, 2014
- Ulvac, Inc.
- Youhei Endo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20150221552
- Publication date Aug 6, 2015
- ULVAC, Inc.
- Junichi Hamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20140332959
- Publication date Nov 13, 2014
- ULVAC, Inc.
- Junichi Hamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140048413
- Publication date Feb 20, 2014
- ULVAC, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF DEVICE
- Publication number 20130178059
- Publication date Jul 11, 2013
- ULVAC, Inc.
- Youhei ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING SURFACE PROCESSING METHOD AND COATING SURFACE PROCESSING AP...
- Publication number 20120121818
- Publication date May 17, 2012
- ULVAC, Inc.
- Shuji Kodaira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20120118732
- Publication date May 17, 2012
- ULVAC, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20120111722
- Publication date May 10, 2012
- ULVAC, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20120103801
- Publication date May 3, 2012
- ULVAC, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMING METHOD
- Publication number 20120097527
- Publication date Apr 26, 2012
- ULVAC, Inc.
- Shuji Kodaira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shuji Kodaira

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Film formation apparatus

Manufacturing method and manufacturing apparatus of device

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

FILM-FORMING APPARATUS

MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF DEVICE

COATING SURFACE PROCESSING METHOD AND COATING SURFACE PROCESSING AP...

FILM FORMATION APPARATUS

FILM-FORMING APPARATUS

FILM FORMATION APPARATUS

FILM FORMATION APPARATUS AND FILM FORMING METHOD