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Shuji Kumagai
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Sputtering device
Patent number
6,461,484
Issue date
Oct 8, 2002
Anelva Corporation
Kamikura Yo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
LOAD LOCK DEVICE
Publication number
20220139729
Publication date
May 5, 2022
Canon ANELVA Corporation
Jun MIURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Sputtering device
Publication number
20020029959
Publication date
Mar 14, 2002
Kamikura Yo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...