Shuji Kumagai

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering device

    • Patent number 6,461,484
    • Issue date Oct 8, 2002
    • Anelva Corporation
    • Kamikura Yo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    LOAD LOCK DEVICE

    • Publication number 20220139729
    • Publication date May 5, 2022
    • Canon ANELVA Corporation
    • Jun MIURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Sputtering device

    • Publication number 20020029959
    • Publication date Mar 14, 2002
    • Kamikura Yo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...