Shuji Mochizuki

Follow

Person

Kofu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma etching method
- Patent number 5,716,534
- Issue date Feb 10, 1998
- Tokyo Electron Limited
- Hiroshi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam excited plasma system
- Patent number 5,539,274
- Issue date Jul 23, 1996
- Tokyo Electron Limited
- Youichi Araki
- H01 - BASIC ELECTRIC ELEMENTS