Shuji Sugiyama

Person

Mito-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...
- Patent number 6,768,113
- Issue date Jul 27, 2004
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...
- Patent number 6,509,564
- Issue date Jan 21, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction exposure apparatus with correction for alignment light ha...
- Patent number 5,214,493
- Issue date May 25, 1993
- Hitachi, Ltd.
- Shuji Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring minute displacement by subject l...
- Patent number 5,164,789
- Issue date Nov 17, 1992
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Projection aligner for fabricating semiconductor device having proj...
- Patent number 4,941,745
- Issue date Jul 17, 1990
- Hitachi, Ltd.
- Shuji Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical exposer
- Patent number 4,690,529
- Issue date Sep 1, 1987
- Hitachi, Ltd.
- Shuji Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical exposure apparatus
- Patent number 4,615,614
- Issue date Oct 7, 1986
- Hitachi, Ltd.
- Shuji Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern exposing apparatus
- Patent number 4,477,182
- Issue date Oct 16, 1984
- Hitachi, Ltd.
- Akihiro Takanashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030155508
- Publication date Aug 21, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030146382
- Publication date Aug 7, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030111616
- Publication date Jun 19, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Shuji Sugiyama

Person

Patents Grantslast 30 patents

WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...

WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...

Reduction exposure apparatus with correction for alignment light ha...

Method and apparatus for measuring minute displacement by subject l...

Projection aligner for fabricating semiconductor device having proj...

Optical exposer

Optical exposure apparatus

Pattern exposing apparatus

Patents Applicationslast 30 patents

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...