Shumao ZHANG

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for depositing high quality PVD films
- Patent number 11,802,349
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Zihao Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...
- Publication number 20250174456
- Publication date May 29, 2025
- Applied Materials, Inc.
- Shumao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective metal Capping with Metal Halide enhancement
- Publication number 20250157824
- Publication date May 15, 2025
- Applied Materials, Inc.
- Shumao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT ENABLING SUPER-CONFORMAL METAL CAP PROFILE ON MID...
- Publication number 20250112091
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Jianqiu GUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE CAPPING FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS
- Publication number 20250079239
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Jiang LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE
- Publication number 20250054767
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qihao ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE BOTTOM-UP METAL FILL/CAP ON JUNCTION SILICIDE BY SELECTIV...
- Publication number 20250054812
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qihao ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW RESISTIVITY CONTACTS
- Publication number 20240379363
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Jianqiu GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A MEOL CONTACT STRUCTURE
- Publication number 20240379768
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Shumao ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Forming Low Resistivity Contacts
- Publication number 20240105444
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jiang LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead Assembly with Heated Showerhead
- Publication number 20240068096
- Publication date Feb 29, 2024
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230377892
- Publication date Nov 23, 2023
- Yiyang WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Passivation Of Damaged Nitride
- Publication number 20230136499
- Publication date May 4, 2023
- Applied Materials, Inc.
- Shumao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS
- Publication number 20210123156
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Zihao YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shumao ZHANG

Person

Patents Grantslast 30 patents

Method for depositing high quality PVD films

Patents Applicationslast 30 patents

THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...

Selective metal Capping with Metal Halide enhancement

SURFACE TREATMENT ENABLING SUPER-CONFORMAL METAL CAP PROFILE ON MID...

SELECTIVE CAPPING FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS

SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE

SELECTIVE BOTTOM-UP METAL FILL/CAP ON JUNCTION SILICIDE BY SELECTIV...

METHODS FOR FORMING LOW RESISTIVITY CONTACTS

METHOD OF FORMING A MEOL CONTACT STRUCTURE

Methods for Forming Low Resistivity Contacts

Showerhead Assembly with Heated Showerhead

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Selective Passivation Of Damaged Nitride

METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS