TREA

Shun EHARA

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,541,502
    • Issue date Jan 3, 2023
    • Ebara Corporation
    • Kuniaki Yamaguchi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,173,523
    • Issue date Nov 16, 2021
    • Ebara Corporation
    • Hidetatsu Isokawa
    • B08 - CLEANING

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210394332
    • Publication date Dec 23, 2021
    • EBARA CORPORATION
    • Kuniaki YAMAGUCHI
    • B24 - GRINDING POLISHING
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20190355594
    • Publication date Nov 21, 2019
    • EBARA CORPORATION
    • Hidetatsu ISOKAWA
    • B08 - CLEANING