Shun ITOH

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Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250096006
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Rin SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING...
- Publication number 20230138006
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING CLEANING CONDITIONS AND PLASMA PROCESSING DEVICE
- Publication number 20210111008
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Shun ITOH
- B08 - CLEANING