Shun MATSUI

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,093,021
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,891,697
- Issue date Feb 6, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by setting process cha...
- Patent number 11,749,550
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,747,789
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system, method of manufacturing semiconductor...
- Patent number 11,422,528
- Issue date Aug 23, 2022
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device by setting process cha...
- Patent number 11,355,372
- Issue date Jun 7, 2022
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device by setting process cha...
- Patent number 11,342,212
- Issue date May 24, 2022
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,314,234
- Issue date Apr 26, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,289,350
- Issue date Mar 29, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,984,991
- Issue date Apr 20, 2021
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,978,310
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Tsukasa Kamakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 10,978,361
- Issue date Apr 13, 2021
- Kokusai Electric Corporation
- Takafumi Sasaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,934,622
- Issue date Mar 2, 2021
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system and met...
- Patent number 10,930,533
- Issue date Feb 23, 2021
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,714,316
- Issue date Jul 14, 2020
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,685,832
- Issue date Jun 16, 2020
- Kokusai Electric Corporation
- Tetsuaki Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device by setting process cha...
- Patent number 10,651,068
- Issue date May 12, 2020
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,541,170
- Issue date Jan 21, 2020
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,533,250
- Issue date Jan 14, 2020
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,503,152
- Issue date Dec 10, 2019
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,453,720
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,424,520
- Issue date Sep 24, 2019
- Kokusai Electric Corporation
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate
- Patent number 10,224,227
- Issue date Mar 5, 2019
- Hitachi Kokusai Electric, Inc.
- Naofumi Ohashi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,735,068
- Issue date Aug 15, 2017
- Hitachi Kokusai Electric Inc.
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,728,431
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Naofumi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,487,863
- Issue date Nov 8, 2016
- Hitachi Kokusai Electric Inc.
- Shun Matsui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 9,431,220
- Issue date Aug 30, 2016
- Hitachi Kokusai Electric Inc.
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,171,734
- Issue date Oct 27, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHA...
- Publication number 20230360942
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230359175
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230085140
- Publication date Mar 16, 2023
- Kokusai Electric Corporation
- Hideharu ITATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF PROCESSING SUBSTRATE, RECORD...
- Publication number 20220360822
- Publication date Nov 10, 2022
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220282369
- Publication date Sep 8, 2022
- Kokusai Electric Corporation
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220244707
- Publication date Aug 4, 2022
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220154341
- Publication date May 19, 2022
- Kokusai Electric Corp.
- Satoshi TAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHA...
- Publication number 20220115254
- Publication date Apr 14, 2022
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220102114
- Publication date Mar 31, 2022
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing System
- Publication number 20220090263
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210395887
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210292904
- Publication date Sep 23, 2021
- Kokusai Electric Corp.
- Satoshi TAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210028041
- Publication date Jan 28, 2021
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210028042
- Publication date Jan 28, 2021
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20210003990
- Publication date Jan 7, 2021
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200144037
- Publication date May 7, 2020
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
- Publication number 20200123654
- Publication date Apr 23, 2020
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200098653
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200089196
- Publication date Mar 19, 2020
- Kokusai Electric Corporation
- Naofumi OHASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200035523
- Publication date Jan 30, 2020
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20190295854
- Publication date Sep 26, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190294151
- Publication date Sep 26, 2019
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND MET...
- Publication number 20190287831
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20190287843
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190242015
- Publication date Aug 8, 2019
- Hitachi Kokusai Electric Inc.
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190244790
- Publication date Aug 8, 2019
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20190221468
- Publication date Jul 18, 2019
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190218664
- Publication date Jul 18, 2019
- Kokusai Electric Corporation
- Tetsuo YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20190221460
- Publication date Jul 18, 2019
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190085455
- Publication date Mar 21, 2019
- Hitachi Kokusai Electric Inc.
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shun MATSUI

Person

Patents Grantslast 30 patents

Processing method, method of manufacturing semiconductor, and subst...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Method of manufacturing semiconductor device by setting process cha...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing system, method of manufacturing semiconductor...

Method of manufacturing semiconductor device by setting process cha...

Method of manufacturing semiconductor device by setting process cha...

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device

Substrate processing apparatus

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus and recording medium

Substrate processing apparatus

Substrate processing apparatus, substrate processing system and met...

Method of manufacturing semiconductor device

Substrate processing apparatus

Method of manufacturing semiconductor device by setting process cha...

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of processing substrate

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Substrate processing apparatus

Substrate processing apparatus and substrate processing system

Substrate processing apparatus, method of manufacturing semiconduct...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING SYSTEM, METHOD OF PROCESSING SUBSTRATE, RECORD...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Substrate Processing System

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

Method of Manufacturing Semiconductor Device

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND MET...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS