TREA

Shun Mikami

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Patents Grantslast 30 patents

  • Information Patent Grant

    Thin film forming apparatus
    • Patent number 8,011,315
    • Issue date Sep 6, 2011
    • ULVAC, Inc.
    • Takafumi Matsumoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM DEPOSITION SYSTEM AND VACUUM DEPOSITION METHOD
    • Publication number 20120082778
    • Publication date Apr 5, 2012
    • ULVAC, Inc.
    • Tetsuya SHIMADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Thin Film Forming Apparatus
    • Publication number 20080141943
    • Publication date Jun 19, 2008
    • Takafumi Matsumoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...