Shun-Yu CHUANG

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Taichung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for cleaning wafer and scrubber
- Patent number 10,522,369
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Chun Hu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR CLEANING WAFER AND SCRUBBER
- Publication number 20160254170
- Publication date Sep 1, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Chien-Chun HU
- B08 - CLEANING