Shun'ichi Matsumoto

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical filtering device, defect inspection method and apparatus th...
- Patent number 9,182,592
- Issue date Nov 10, 2015
- Hitachi, Ltd.
- Taketo Ueno
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Optical Filtering Device, Defect Inspection Method and Apparatus Th...
- Publication number 20140160471
- Publication date Jun 12, 2014
- Taketo Ueno
- G02 - OPTICS