Shunichi Matsumoto

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 9,064,916
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 8,741,064
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Heat treatment method and heat treatment apparatus wherein the subs...
- Patent number 8,230,806
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Heat treatment method wherein the substrate holder is composed of t...
- Patent number 7,900,579
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20140220503
- Publication date Aug 7, 2014
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20120329291
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C21 - METALLURGY OF IRON
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20110162633
- Publication date Jul 7, 2011
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Application
Heat treatment method and heat treatment apparatus
- Publication number 20090081887
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C21 - METALLURGY OF IRON